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I. Fundamental Theory Enhancement

1. MEMS Device Principles

• Supplement fundamental principles of MEMS sensors (e.g., thermal convective type, piezoresistive type, capacitive type).
• Study the working mechanism of thermal convective tilt sensors (gas thermal diffusion, relationship between temperature gradient and tilt angle).
• Understand fluid dynamics and heat transfer characteristics at micro/nano scales (e.g., gas flow models in microcavities).

Reference books

• 微机电系统基础：Basically covers the basic principles, devices and research methods of MEMS technology.

• MEMS与微系统 设计、制造及纳尺度工程

Reference online courses

• COMSOL官方 - COMSOL MEMS仿真: COMSOL official bragging course has no real substance. The only example is still a piezoelectric sensor. It is okay to get familiar with the basic operations of COMSOL.
• COMSOL官方 - MEMS模块多物理场仿真培训: COMSOL official simulation training has a very long duration.
• 印度理工学院 - MEMS与微系统: Open online courses by Indian bros, having picture quality comparable to that of landline phones. They are courses at an introductory level.

2. Multiphysics Coupling Theory

• Master basic equations for thermal-fluid-structure coupling (e.g., Navier-Stokes equations, heat conduction equation, structural mechanics equations):$$\rho (\frac{\partial \mathbf{u}}{\partial t}+\mathbf{u}\cdot \mathrm{\nabla }\mathbf{u})=-\mathrm{\nabla }p+\mu {\mathrm{\nabla }}^2\mathbf{u}+\mathbf{F}$$
• Learn multiphysics modeling methods in COMSOL (e.g., boundary condition configuration, parametric sweeps).

Reference books

This needs to be learned a bit more. I don't expect you to learn all of them one by one. Here I list a few reference books for your reference.

Theoretical Mechanics

力学（第五版）: Landau for the win! Of course, this book is not suitable for beginners like us. Just enshrine it here like a deity.

Thermodynamics and Statistical Physics

Fluid Mechanics

Heat Transfer

Continuum Mechanics

Computational Fluid Dynamics (CFD)

Reference online courses

3. Material & Fabrication Fundamentals

• Investigate thermal properties of microelectronics materials (e.g., thermal conductivity $k$ and thermal expansion coefficient $\alpha$ of silicon, glass, PDMS).
• Familiarize with impacts of MEMS fabrication processes (photolithography, etching, thin-film deposition) on device performance.

II. Advanced Simulation Tools

1. Advanced COMSOL Applications

   • Learn 3D modeling techniques (complex geometry construction, mesh optimization)
   • Master parametric simulation and optimization modules (e.g., parametric scans, sensitivity analysis)
   • Practice multiphysics coupling simulations (thermal-field, flow-field, and structural-field joint analysis)

2. Data Analysis & Visualization

   • Process simulation data using MATLAB/Python (temperature field distribution, flow velocity field extraction)
   • Learn data fitting and optimization algorithms (e.g., genetic algorithms, gradient descent methods)

III. Interdisciplinary Knowledge Expansion

1. Fundamentals of Fluid Mechanics

   • Supplement microscale fluid mechanics (e.g., impact of Knudsen number $Kn$ on flow regimes).
   • Study mathematical models for natural and forced convection (e.g., Grashof number $Gr$, Prandtl number $Pr$).

2. Thermal Science & Heat Transfer

   • Master heat transfer mechanisms: conduction, convection, and radiation.
   • Understand thermal boundary layer theory and its applications in sensor design.

3. Gas Dynamics

   • Investigate thermophysical properties of gases (air, argon, nitrogen): specific heat capacity $c_p$, viscosity $\mu$.
   • Study the impact of gas species on thermal convection responses (e.g., enhanced sensitivity with low-density gases).

IV. Research Skill Enhancement

1. Literature Retrieval & Review

   • Learn to search for cutting-edge MEMS sensor papers using academic databases (IEEE Xplore, ScienceDirect).
   • Master literature management tools (EndNote/Zotero) and academic writing standards.

2. Experimental Design Thinking

   • Understand simulation-experiment correlation (e.g., guiding fabrication parameters via simulations).
   • Learn experimental error analysis and validation methods (e.g., comparison with experimental data).

3. Project Management & Collaboration

   • Define phased goals and workflows (e.g., 2D optimization → 3D modeling → multi-scenario validation).
   • Adopt collaboration tools (Git version control, online document sharing).

V. Practical Skill Supplementation

1. Micro/Nanofabrication Basics

   • Observe MEMS fabrication processes in labs (e.g., photolithography, dry/wet etching).
   • Learn how process parameters affect device performance (e.g., thin-film thickness control).

2. Prototype Testing Fundamentals

   • Understand sensor test platform setup (e.g., temperature control systems, tilt-stage calibration).
   • Study signal acquisition and noise suppression methods (e.g., lock-in amplification techniques).

VI. Frontier Exploration

1. Novel Material Applications

   • Explore flexible materials (PDMS) and nanomaterials (graphene) in MEMS.
   • Investigate packaging impacts on sensor stability (e.g., vacuum encapsulation, pressure control).

2. Low-Power Design Concepts

   • Optimize heat source power via pulsed heating and dynamic power management.
   • Explore self-powering technologies (e.g., energy harvesting-storage integration).

贡献者

Tuntun Yuchiha

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95f4d-Refactor code structure for improved readability and maintainability